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Electron Microscope Analyzers

QUANTAX EDS for SEM

XFlash® 7 - The Latest EDS Detector Series

The Right Angle for Better Analysis

Fast. Precise. Reliable.

1,000,000
cps
Real analytical throughput up to 1,000,000 cps
Achieve unmatched analysis speed
> 2,200
Element lines
Quantify the most complex data using the most comprehensive atomic database incl. K, L, M and N lines
> 1.1
sr
Largest solid angle for X-ray collection
Maximize your sample throughput with optimum geometry for most efficient collection of the generated X-rays

Energy-Dispersive Spectrometry for SEM, FIB-SEM and EPMA

  • Bruker's latest generation of QUANTAX EDS features the XFlash® 7 detector series, which provides the largest solid angle for X-ray collection (also called collection angle) and the highest throughput. 
  • The XFlash® 7 continues to set standards in performance and functionality in energy-dispersive spectrometry for the Scanning Electron Microscope (SEM), Focused Ion Beam (FIB-SEM) and Electron Probe Micro Analyzer (EPMA).
  • The XFlash® 7 detector family also offers optimized solutions for EDS analysis of electron transparent specimens in TEM and SEM, as well as the unique XFlash® FlatQUAD, a detector made to answer your questions on challenging samples.
  • Slim-line technology, large collection angle design and latest generation pulse processing.
  • Increase system uptime with on-site SDD module exchange.
  • Highest spectral performance obtained with best energy resolution.
  • Increased accuracy of results by sophisticated quantification algorithms and a unique combination of standardless and standard-based methods.

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Make Your Elemental Analysis more Efficient!

  • Gain very precise results faster with individually optimized EDS systems. It ensures unmatched speed and precision. 
  • Shorten measurement time with maximized throughput, enabling mapping and quantification at all settings with no limitation of data size.
  • Analyze challenging samples now, thanks to the most efficient geometric collection of generated X-rays.
  • Benefit from accurate and reliable quantification results with optimized geometry minimizing background and avoiding absorption.
  • Detect small quantities with better detection limit, lower background and less absorption.
  • One for all - seamless integration of EDS, WDS, EBSD, and Micro-XRF in the comprehensive ESPRIT analysis platform for any SEM, FIB-SEM and EPMA.

Applications of SEM EDS

Electronics & Semiconductor
Elemental maps of FinFET structure taken using ultra-high spatial resolution EDS

Ultra-High Spatial Resolution EDS SEM of Semiconductor Devices

The acquisition of TEM-like EDS maps is also possible using a FE-SEM equipped with a high collection-effiency EDS detector. Here we present the unique capability of Bruker’s XFlash® 7100oval for the acquisition of ultra-high spatial resolution SEM EDS elemental maps.
Map Elements at Ultra-High Spatial Resolution
Surface and depth features resolved with SEM EDS using different kV

Compositional Analysis of an IC Chip's Surface and Substructure

SEM EDS analysis with the XFlash 7® EDS detector can be used for the compositional analysis of both a semiconductor's surface and substructure. 
Analyze Surface & Sub-Surface Features
Elemental distribution of different layers of an IC chip with SEM EDS

SEM EDS Analysis of Interconnecting Layers of a Bulk 7 nm Process FinFET

Bruker's EDS Detectors acquire high-resolution elemental maps with a high count rate and a low probe current, meaning semiconductor layer analysis can be carried out faster and with high reliability. 
Analyze Semiconductor Layers
composite EDS map

Fast Elemental Mapping of Si and W Wafer Etching Residues

The new generation of XFlash® detectors make mapping at very high input count rates (ICR) possible. This example showcases the XFlash® detectors’ mapping capabilities of an element combination with overlapping peaks (Si and W) at very high count rates. 
Map elements at high count rates
Geology & Mineralogy
single frame EDS map captured in seconds showing elemental distribution of minerological samples

High Resolution Chemical Snapshot with QUANTAX FlatQUAD

Typically, SEM imaging (> 1024 px wide) takes around 30 – 120 seconds to acquire a gray scale image with little to no information about the chemistry of the material. QUANTAX FlatQUAD, with unmatched efficiency and spectral quality, transforms regular “imaging” into high resolution and high-speed EDS mapping.
Capture a chemical snapshot
Element distribution map of volcanic rock

Determining Magmatic Evolution using SEM EDS

The magmatic evolution of volcanic minerals over tens of thousands of years of volcanic minerals can be analyzed using SEM EDS. Discover more about the history of geological samples in just a few minutes. 
Analyze Phases in Geological Samples
Mocs historic meteorite: Composite net intensity map showing sulfur and lead deposides in the cracks of the meteor

High Resolution Elemental Mapping of a Meteorite Specimen

Elemental distribution mapping with Scanning Electron Microscope does not require sample preparation when using Bruker's unique XFlash FlatQUAD EDS detector. Here we present results acquired on a meterorite specimen.
Analyze Samples with No Sample Prep
SE-image of a ternary alloy with rough sample topography and certified concentration values

EDS Quantification on Materials with Rough Topography

Reliable EDS Quantification is possible using the correct methods and the right detector. Here we describe how QUANTAX FlatQUAD  combined with a specific method can be used to quantify the elements present in a sample with high topography. 
Determine the Elements in Topographic Samples
X-ray elemental maps of a mantle peridotite sample

Elemental Mapping of a Geological Thin Section with SEM EDS

Elemental distribution of an entire mineralogical thin section can be achieved in few minutes with EDS mapping.
Images Elements in Large Samples
Life Sciences
Elemental map showing the mineral distribution on a plant trichome/hair. SIlicon is present on the tip, calcium in the main body and phosphorus and magnesium at the root.

Investigating Mineral Distribution in Plant Trichomes with EDS

Here we demonstrate the elemental mapping of a fresh sample of Echium hypertropicum using EDS with the innovative XFlash® FlatQUAD detector and a cooling stage. 
Map biomineral distribution
Elemental map showing the silicon rich body of a seaworm with calium phosphate bristles protruding from it

Elemental Mapping of Marine Organisms using SEM EDS

The high-resolution elemental mapping of delicate biological samples, such as marine specimens, is possible using an annular detector. This unique design provides a high-collection efficency and minimizes shadowing effects. 
Analyze Organisms
Elemental map showing the silicon rich body of a seaworm with calium phosphate bristles protruding from it

Elemental Mapping of Biominerals in Microbial Mats

Detailed elemental mapping and analysis of life science samples is possible using the XFlash® FlatQUAD detector. Here we look at the formation and growth of calcium carbonate crystals within a microbial mat.
Analyze Biominerals
Element distribution map of nettle by SEM EDS

Elemental Analysis of a Plant Sample using Dual EDS Detection

A high beam sensitivity, difficult topography and low count rate yield mean that the fast, non-destructive analysis of biological materials is difficult. The use of a dual EDS detector system can overcome these challenges 
Analyze Elements in Biological Materials
Materials Science
EDS spectrum of HfB2 acquired at 5 kV; Inset picture shows magnified spectra in the 100 - 250 eV region

Low-kV Elemental Analysis of Borides Ceramics for UHT Applications

Ultra-high temperature (UHT) boride ceramics can be analyed at a low probe current using the latest in EDS technology. 
Analyze Samples at Low Probe Currents
Bismuth segregation in AgPbTeBi Thermoelectric materials

Automated Peak Fitting to Resolve Grain Boundaries in Thermoelectric Materials

Automated peak fitting and deconvolution during EDS data processing allows for the resolving of elements which have strong overlaps. This application looks at the resolution of bismuth and lead in a themoelectric material.
Resolve elemental peaks automatically
Metallurgy
EDS map of a failed welding seam

High Throughput Element Mapping of Zr-steel Welding Seam

High-throughput, i.e., high-speed EDS element mapping using XFlash 7® quickly provides post-welding information about the local structure and potential failures.
Map elements at high throughput
Low kV EDS mapping of Nickel-based single crystal superalloy

Elemental Mapping and Phase Discrimination of Single Crystal Superalloys

The high collection efficiency of Bruker XFlash® EDS detectors enables a high signal to noise ratio, facilitating the spatial determination of alloying element concentrations at a low kV with high magnification.
Determine Alloy Phases
EDS map and SE image of coating layers on tungsten carbide cutting tools

Studying Tungsten Carbide Coatings for Metal Cutting Tools

The two-dimensional nature of these films and buried interfaces poses challenges in reliable analysis of these class of materials. In this application example, TiC/N, and Al2O3 layers on WC-Co layers are mapped with EDS. 
Analyze Layers with EDS SEM
Nanomaterials
Silicon nanoparticles with carbon in red and Silicon in green

Ultra-high Resolution Elemental Mapping of Si-core-C-shell Silicon Nanoparticles

Mapping the elemental distribution of beam-sensitive samples, such as silicon-core–carbon-shell nanoparticles is possible via EDS SEM using Bruker's unique FlatQUAD detector.
Analyze Nanoparticles
And more...
Higher spatial resolution maps with SEM EDS

Structural and Elemental Analysis of a Chalcolithic Smelting Vessel

Artworks and cultural heritage items reveal a great deal about our past. Learn how you can use SEM EDS to gain a deeper understanding of the history of these objects…
Explore the History of Archaeological Objects

Webinars on Energy Dispersive X-Ray Spectroscopy

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Webinars on Energy Dispersive X-Ray Spectroscopy

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Resources & Publications

Learn more about EDS

Interested in learning more about EDS? Visit our explainer page: 

Learn about Full Range EDS - Combining EDS with micro-XRF on SEM

The combination of EDS with micro-XRF on SEM extends the energy range and elemental sensitivity. To find out more about this powerful combination visit our explainer page:

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