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EDS for S/TEM Applications

Quantitative analysis

Cliff-Lorimer Factor Editor

The quantification of EDS spectra is one of the most important steps of analysis. ESPRIT uses advanced spectra processing and analysis tools including the Cliff-Lorimer routine for quantification. Thanks to the high efficiency of the XFlash® detectors excellent results can be obtained in the light element and low energy range as well as in the range above 50 keV. More info

Characterizing a semiconductor structure

NiSi(Pt)-NiSi2 Junction, Quantitative Pt Map

Increasingly higher integration of circuits makes the element analysis of very small structures necessary. This application example illustrates the chemical characterization of a Pt-alloyed NiSi-NiSi2 structure. More info

EDS for life science

Bright Field Image and Single Element Maps of a Yeast Cell

The excellent light element detection capabilities of the XFlash® detectors enable many applications in life science, particularly in bio-mineralization. This is demonstrated with the mapping of a yeast cell that has been Os-stained and labeled with Ag. More info

A magnetic nanostructure

HAADF Image of a Magnetic Nanostructure with Layers Annotated

This application example shows element maps of a layered magnetic nanostructure on a SiO2 sphere. Seed and magnetic layers and their constituents can easily and quickly be located on the nm-scale and the quality of the production process assessed. More info

Investigating a core shell particle

HAADF Image of a Pd Pt Core Shell Particle Overlaid with Pd and Pt Mixed Element Map

Particles with a core shell structure are often used in nanotechnology, especially in catalysis. Here a Pd Pt core shell particle is analyzed both qualitatively and quantitatively. More info 

Chemical phase analysis of a layer system

Chemical Phase Map of a Layer Structure

Chemical phase analysis is a useful complement to element mapping in STEM. This application demonstrates how ESPRIT Autophase can help to better understand the structure of a layered sample. More info

Chemical characterization of nanowires

Nanowires, Mixed Element Map

Nanostructures, such as nanowires and nanorods and functionalized nanovehicles are of growing interest for various applications in nanotechnology, be that nano-electronics or drug delivery in the human body. Multilayered III-V-nanowires to be applied in the development of single electron transistors were investigated using 0.12 sr at 22° TOA. More info

Atom column EDS

Map and Spectrum of an InGaAs Semiconductor Structure

EDS analysis is also possible using Cs-corrected STEM without influencing the instrument performance. Analysis of an InGaAs semiconductor shows that even composition variations on an atomic scale can be identified with EDS. More info

Single atom EDS

Single Silicon Atom in Graphene
Single silicon atom in graphene

The unique properties of the XFlash® detectors for TEM support EDS at the highest possible spatial resolution. This application example shows the analysis of single atoms on graphene at 60 kV in STEM. More info

Individual heteroatom identification with X-ray spectroscopy

Individual heteroatoms in nanoscale materials often play a pivotal role in materials properties. To obtain maximum control over materials properties, researchers must be able to detect and identify diverse heteroatoms in samples with varying thickness and composition. This application example demonstrates the identification of individual Si, S, P, and Ca heteroatoms in two-phase carbonaceous nanoscale mixtures with energy dispersive X-ray spectroscopy in a scanning transmission electron microscope. More info

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