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Chemical Phase Analysis of a Layered Structure

In many cases it is advantageous to process element maps further to obtain a clearer image of the sample. This is demonstrated with a quantitative map of a multi-layer sample. The first image in the gallery shows the quantitative mixed element map of the sample. The map has a fairly "noisy" appearance. Three areas were defined containing representative parts of the region of interest, two large rectangles and a smaller circular area for testing the procedure.

Autophase can be started in the"Objects" mode. It can use the defined regions as reference in a principal components analysis to find similarly composed regions in the map and assign these to phases. The result is shown in the second image in the gallery. Two phases differing in Zn and Cd content can be distinguished and located. The carbon conatimantion caused on the sample surface by line scans and point analysis has been assigned to a third phase by this procedure. The grey area on the left, outside of the region of interest, is "Unassigned" and differently composed compared to the other phases. The phase on the right apparently also contains carbon.