Analysis of a Ceramics Capacitor with the XFlash® FlatQUAD and a Conventional SDD

This application example compares the analysis of a ceramic capacitor at a very low beam current using the XFlash® FlatQUAD and a conventional SDD. The investigated multilayer ceramic capacitor contains Si, Ti, Ni, Cu, Zr, Sn and Ba. All maps were obtained with 512 × 384 pixels, at 10 kV and with an acquisition time of 170 s. The conventional detector generated an input count rate (ICR) of only 260 cps, resulting in a total of 41,000 counts in the map. The map generated under identical identical conditions using the XFlash® FlatQUAD at an ICR 28,000 cps, produced 4,800,000 counts in total. This is more than sufficient for further processing, e.g. for generating a chemical phase map to obtain an even clearer of the sample, as shown here.