Contour Elite X Tip Tilt Head v1
Contour Elite X Banner Bv2

Fully Automated Optical Profiler

Production-ready 3D metrology for industrial applications

The fully automated, large-sample Contour Elite X 3D Optical Microscope combines unmatched measurement capabilities with highest vertical resolution over the industry’s largest field of view. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the Contour Elite X offers the ultimate gauge-capable 3D optical microscopy solution.

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Contour Elite X tool image v1
Contour Elite K

Robust, Production Gauge-Capable Reliability

In addition to the unmatched measurement and imaging capabilities of Bruker-exclusive interferometry technology, the Contour Elite X is equipped with a proprietary internal laser reference and custom-designed industrial cabinet for maximum stability and robustness.

The system’s automation-ready configuration includes everything necessary for almost any production environment, including an air table tabilizer kit for enhanced X, Y, Z wafer placement accuracy, optimization of PDU, EMO and vacuum systems for integration, and modified vacuum chucks for autoloader end-effector compatibility.

Contour Elite X tilting head and platform v1
Contour Elite X Stage v1

Streamlined Automation and Precision

This motorized X,Y stage equips Contour Elite X with 12-inch encoded movement in the X and Y directions. Sample positioning is made easy with the joystick and software interface controls. An integral part of the Contour Elite X system, this X,Y stage provides automated routines such as multiple-point data collection and stitching capability for large area analysis. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning.

Accurate Metrology Plus High-Fidelity Imaging

Contour Elite X provides the best available lateral resolution in an industrial 3D optical microscope, giving it an enhanced capability to quantify edge variations even on the smallest structures. Contour Elite’s high-fidelity imaging reveals specific surface details that otherwise would be difficult or impossible to see and enables users to segment data based on color or grayscale information to rapidly select areas of interest and collect critical metrology data from these specific regions.

  • Real-time automated measurement optimization
  • Extensive library of filters and analysis options
  • Customized analysis reporting
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Contour Elite Vision 64 Software v1

Intuitive Analysis and Ease-of-Use

Contour Elite’s streamlined user interface maximizes user efficiency and simplifies measurements and analyses. Contour Elite is not only simple to use, it is also the most comprehensive and fully featured 3D surface metrology platform available today.

Contour Elite X makes this all possible through Bruker's Award-winning Vision64® software and a streamlined staging design provide intuitive analysis capabilities and ease of use. Contour Elite X has everything needed for production measure on-demand applications.